- Title
- Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
- Creator
- Rakotondrabe, Micky; Fowler, Anthony G.; Moheimani, S. O. Reza
- Relation
- IEEE Sensors 2012. Proceedings of the IEEE Sensors 2012 (Taipei, Taiwan 28-31 October, 2012)
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2012.6411138
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2012
- Description
- This paper reports a new 2-degree of freedom (DoF) microelectromechanical systems (MEMS) nanopositioner with actuation and sensing elements on the same chip. Novel features of this MEMS device include its 2-DoF (x-y axis) motion capability, the achievement of bi-directional movement (positive and negative displacement) along each axis thanks to the use of Z-shaped electrothermal actuators, and the measurement of x-y displacements by integrated electrothermal sensors positioned underneath the moving stage. The experimental characterization shows that displacements in excess of -5μm/+5μm and a response time of less than 300ms are achievable.
- Subject
- displacement measurement; microactuators; microsensors; nanopositioning; nanosensors
- Identifier
- http://hdl.handle.net/1959.13/1305494
- Identifier
- uon:21060
- Identifier
- ISBN:9781457717673
- Language
- eng
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